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Journal Articles Ultramicroscopy Year : 2021

Atom probe tomography quantification of carbon in silicon

P. Dumas
S. Duguay
J. Borrel
F. Hilario
D. Blavette
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hal-03468007 , version 1 (06-12-2021)

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P. Dumas, S. Duguay, J. Borrel, F. Hilario, D. Blavette. Atom probe tomography quantification of carbon in silicon. Ultramicroscopy, 2021, 220, pp.113153. ⟨10.1016/j.ultramic.2020.113153⟩. ⟨hal-03468007⟩

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