A gold–palladium thin-film microsensor array for thermal imaging of laser beam waists - Normandie Université Access content directly
Journal Articles Sensors and Actuators A: Physical Year : 2000

A gold–palladium thin-film microsensor array for thermal imaging of laser beam waists

Abstract

A new thermal microsensor, developed to control the position, focusing and 2D energy profile of laser beam waists is described. The sensitive area consists of a planar array of 16 individual thin-film gold–palladium thermocouple junctions (8×8 μm2), processed by means of standard integrated circuit technology (metallization on a glass substrate). The sensor thermoelectric response is determined; especially, the dynamic behaviour is characterized by measuring the time constant. Finally, thermal images and 2D beam energy profiles are obtained by scanning the sensor through Gaussian waists; a good agreement between the experimental results and the Gaussian beam theory is observed.

Dates and versions

hal-02157825 , version 1 (17-06-2019)

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B. Serio, H. Gualous, J.P Prenel. A gold–palladium thin-film microsensor array for thermal imaging of laser beam waists. Sensors and Actuators A: Physical , 2000, 84 (3), pp.303-309. ⟨10.1016/S0924-4247(00)00402-7⟩. ⟨hal-02157825⟩
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